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经营范围
发明名称
Gasphasenbeschichtungsverfahren
摘要
申请公布号
DE50306397(D1)
申请公布日期
2007.03.15
申请号
DE20035006397
申请日期
2003.11.27
申请人
SIEMENS AG
发明人
KAISER, AXEL, DR.;KRUEGER, URSUS, DR.;REICHE, RALPH;STEINBACH, JAN, DR.
分类号
C23C10/08;C23C10/18;C23C10/30;C23C10/48;C23C26/00
主分类号
C23C10/08
代理机构
代理人
主权项
地址
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