| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro sample block capable of shortening a thinning time for a micro sample while securing rigidity as a sample block. SOLUTION: This micro sample block 10 is made of silicon over the whole thereof, and is formed into multi-staged structure with four stages along a vertical direction (Z-direction). The micro sample block 10 is symmetric with respect to the center face A, when viewed for a side face, and a thickness (Y-directional length) is thinned along toward the upper stages. The first stage 11 and the second stage 12 of the micro sample block 10 are extended X-directionally, and five protrusion portions 1-5 constituted respectively of the third stage 13-53 and the fourth stage 14-54 are arrayed X-directionally to be projected Z-directionally from an upper face of the second stage 12. The protrusion portions 1-5 are uniform in heights (Z-directional length) and the thicknesses (Y-directional length), but widths (X-directional length) thereof are formed optionally in response to a dimension of a micro sample piece S, or the like. The micro sample piece S is fixed onto the fourth stage 14-54 to make a surface thereof, i.e. a plane for thinning preparation, in parallel to an XZ-plane. COPYRIGHT: (C)2007,JPO&INPIT
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