| 摘要 |
PROBLEM TO BE SOLVED: To provide two gain means of short lives, one of which generates a seed beam and the other amplifies the seed beam. SOLUTION: A single-chamber gas discharge laser system is provided, which has a pulse power supply that repeatedly generates electric discharges at least at 1,000 pulses a second. The discharges, together with a laser optical device, generate two gain means for a short duration, one of which gain means for generating the seed beam, and the other for amplifying the seed beam. A laser gas is circulated along a circulation path in a chamber. An electrode (18A) and the discharges are so arranged that debris generated from one of the gain means do not circulate to the other gain means until the debris has circulated around 90% of the circulation path in the chamber during discharge. COPYRIGHT: (C)2007,JPO&INPIT
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