| 摘要 |
Embodiments of the present invention generally relate to sputtering of materials. In particular, the invention relates to sputtering voltage used during physical vapor deposition of large area substrates to prevent arcing. One embodiment of the invention describes an apparatus for sputtering materials on rectangular substrates at a voltage less than 400 volts, that comprises a sputtering target; wherein the target is biased at a voltage less than 400 volts during sputtering materials on the rectangular substrates, a grounded shield surrounding the sputtering target, wherein the shortest distance between the grounded shield and the sputtering target is less than the plasma dark space thickness, a magnetron in the back of the sputtering target, where in the edge of the magnetron does not overlap the grounded shield, and an antenna structure placed between the sputtering target and the substrate, wherein the antenna structure is grounded during sputtering.
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