| 摘要 |
An indexer for a wafer cassette is provided to avoid movement and noise of an encoder connector caused by vibration of a motor by forming the encoder connector connected to a motor used in an indexer for a wafer cassette while using a circular plug and a terminal. A cassette in which wafers are stacked is placed on a support table. An elevation apparatus vertically moves the support table in combination with the support table. Driving force is applied to the elevation apparatus by a motor. The motor can be a stepping motor. An encoder detects rotation of the motor to output a position signal. An encoder connector part connects the motor to the encoder, including a cable(216) connected to the encoder, a circular plug(210) connected to the cable, and a terminal box(220) having a circular terminal(225) such that the terminal box is connected to the motor. The plug has four connection pins(214).
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