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发明名称
正型光阻组成物及使用它之图案形成方法
摘要
本发明提供一种用于藉光化射线或放射线形成图案之正型光阻组成物,其确保敏感度、解析度及图案外形良好,线边缘粗度小且表面粗度令人满意,及一种使用此组成物之图案形成方法,其中正型光阻组成物为一种包括以下之正型光阻组成物:(A)一种在以光化射线或放射线照射时可产生酸之化合物,及(B)一种在酸之作用下增加其在硷显影剂中溶解度之树脂,此树脂包括指定之重复单元;及一种使用此组成物之图案形成方法。
申请公布号
TW200643631
申请公布日期
2006.12.16
申请号
TW095109383
申请日期
2006.03.20
申请人
富士照相软片股份有限公司
发明人
平野修史;水谷一良
分类号
G03F7/039(2006.01);H01L21/268(2006.01);H01L21/027(2006.01)
主分类号
G03F7/039(2006.01)
代理机构
代理人
何金涂;何秋远
主权项
地址
日本
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