| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photodetector inspection method and photodetector inspection device capable of improving reliability of inspection when inspecting photo-sensitivity of a photodetector. <P>SOLUTION: When measuring photo-sensitivity of a chip comprising a plurality of photodiodes, the chip is set on a wagfer tester 1, and a single photodiode is irradiated with laser light from a laser head 5. A photo-sensitivity value is calculated based on an output voltage at that time. This operation is performed in order on all the photodiodes. <P>COPYRIGHT: (C)2007,JPO&INPIT |
