| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for measuring high precision 3D shape for measuring the fine shape of the whole shape and a defect of a product or a component simultaneously with high precision in the production process and the inspection process. SOLUTION: The high precision 3D shape measuring device 20 is constituted with:the multi-luminous flux interference pattern projector 1, 11 or 13 assembled with the multi-luminance flux interferometer; the television camera 17; and the shape analyzer 18. The multi-luminance flux interference pattern formed by the multi-luminance interference with fine line width of high brilliance and high contrast is projected on the object. From the deformation of the interference pattern, the whole shape and fine shape of the defect are measured simultaneously on line highly precisely. COPYRIGHT: (C)2006,JPO&NCIPI
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