| 摘要 |
The evaluation method comprises a step (S 11 ) of setting an aberration polynomial that generally expresses the aberration of the imaging optical system as a function of the image plane coordinates and pupil coordinates, a measurement step (S 12 ) of measuring the wavefront aberration of the imaging optical system for a plurality of points in the image plane of the imaging optical system, an approximation step (S 13 ) of approximating a specified polynomial as a function of the pupil coordinates to the wavefront aberration obtained in the measurement step, and a step (S 14 ) of determining the coefficients of the respective terms of the aberration-polynomial on the basis of the coefficients of the respective terms in the specified polynomial obtained in the approximation step.
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