PLASMA GENERATION DEVICE AND PLASMA GENERATION METHOD

摘要

PROBLEM TO BE SOLVED: To easily carry out impedance matching so as to get uniform plasma in generating the same by using an array antenna with a plurality of antenna elements arranged in parallel and in plane constituted of rod conductors with their surfaces covered with dielectrics.

SOLUTION: In generating plasma by using an array antenna with a plurality of antenna elements arranged in parallel and in plane, impedance matching is carried out by changing a capacity of a capacitance element of an impedance matching unit 26 and frequencies of high-frequency signals.

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