SUBSTRATE HEATING APPARATUS,申请号KR20050056612-传众专利搜索

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发明名称	SUBSTRATE HEATING APPARATUS
摘要
申请公布号	KR20060048643(A)	申请公布日期	2006.05.18
申请号	KR20050056612	申请日期	2005.06.28
申请人	NGK INSULATORS, LTD.	发明人	GOTO YOSHINOBU;TSURUTA HIDEYOSHI
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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