| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a deformable mirror having a reflection surface capable of large deformation. <P>SOLUTION: The deformable mirror 100 is composed of a mirror substrate 110 and an electrode substrate 130 which are bonded with each other. The mirror substrate 110 is provided with a flexible thin film part 112, a connection part 114 that surrounds the flexible thin film part 112 and a fixing part 116 that fixes the connection part 114. The flexible thin film part 112 has a reflection surface 118 on the upper surface. The connection part 114 is a mesh-shaped and the mechanical rigidity thereof is lower than that of the flexible thin film part 112. A conductive thin film 122 is disposed on the lower surface of the flexible thin film part 112 and the connection part 114. The electrode substrate 130 is provided with a recess 132 on a part confronted with the flexible thin film part 112 and the connection part 114, an encircling protrusion 134 on a part confronted with the outer circumference of the flexible thin film part 112 and a driving electrode 138 on a region surrounded by the protrusion 134. The conductive thin film 122 and the driving electrode 138 are arranged opposite to each other with an interval and the edge of the protrusion 134 may be brought into contact with the lower surface of the flexible thin film part 112. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
