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发明名称
APPARATUS FOR PLASMA REACTION
摘要
申请公布号
KR100561199(B1)
申请公布日期
2006.03.08
申请号
KR20050111486
申请日期
2005.11.21
申请人
KOREA INSTITUTE OF MACHINERY & MATERIALS
发明人
KIM, KWAN TAE;SONG, YOUNG HOON;LEE, DAE HOON;LEE, JAE OK;CHA, MIN SUK;SHIN, WAN HO;KIM, SEOCK JOON
分类号
H05H1/42
主分类号
H05H1/42
代理机构
代理人
主权项
地址
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