| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope with an improved observation property and operability. SOLUTION: The electron microscope is equipped with a sample stage capable of slanting a sample, a camera photographing an electron microscope image of the sample, a monitor displaying an electron microscope image of the sample, and an area means calculating a sharp image area depending on the slanting angle of the sample, and the sharp image area is displayed on the monitor. Further, the electron microscope is equipped with a visual field deviation detection means judging existence of view field deviation, and a visual field correction means correcting the visual field. COPYRIGHT: (C)2006,JPO&NCIPI
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