Method for fabricating dielectric mixed layers and capacitive element and use thereof

摘要

The present invention provides a method for fabricating a capacitive element ( 100 ), a substrate ( 101 ) being provided as a first electrode layer of the capacitive element ( 100 ), the substrate ( 101 ) provided as an electrode layer is conditioned, a dielectric layer ( 102 ) is deposited on the conditioned substrate ( 101 ) and a second electrode layer ( 104 ) is applied on the layer stack produced, the layer stack being modified by a heat treatment in such a way that the dielectric layer ( 102 ) deposited on the conditioned substrate ( 101 ) forms a dielectric mixed layer ( 105 ) with a reaction layer ( 103 ) deposited on the dielectric layer ( 102 ), which dielectric mixed layer has an increased dielectric constant (k) or an increased thermal stability.