| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas proportion control valve capable of stably controlling the proportion from a small flow rate to a large flow rate without using a special mechanism such as a solenoid opening and closing valve. SOLUTION: When a valve element of a small flow rate control valve mechanism is opened to some degree, the valve element 2 is brought into contact with a packing 72 to stop gas flow passing through a clearance gap formed by the valve element 2. COPYRIGHT: (C)2006,JPO&NCIPI
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