发明名称 EXPOSING MASK AND PRODUCTION METHOD THEREFOR AND EXPOSING METHOD
摘要 An exposing mask capable of obtaining a sufficient gradient with a simple structure and forming a 3-D shape by exposing. An exposing mask (M) used in an exposure system (S), wherein a plurality of pattern blocks, each comprising a pair of a light shielding pattern for shielding light emitted from the exposure system (S) and a transmission pattern for transmitting this light, are continuously arranged, and they are provided at a constant pitch with a ratio between a light shielding pattern and a transmission pattern gradually varying.
申请公布号 KR20050092340(A) 申请公布日期 2005.09.21
申请号 KR20047014520 申请日期 2004.01.28
申请人 SONY CORPORATION 发明人 OZAWA KEN
分类号 G02B5/00;G02B3/00;G03F1/68;G03F1/70 主分类号 G02B5/00
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