NEW FERRIMAGNETIC ALTERNATIVE MULTILAYER FILM COMPLEX, ITS PRODUCTION PROCESS AND THREE-DIMENSIONAL INTEGRATED CIRCUIT EMPLOYING IT

摘要

PROBLEM TO BE SOLVED: To provide an alternative multilayer film complex having ferrimagnetism in which a spinel type ferrite epitaxial growth layer and an epitaxial growth layer of titanium or titanium alloy are formed in tight contact on a single crystal substrate, and to provide a three-dimensional integrated circuit incorporating it. SOLUTION: In the ferrimagnetic alternative multilayer film complex, a spinel type ferrite epitaxial growth layer and an epitaxial growth layer of titanium or titanium alloy are formed alternately in three or more layers on a single crystal substrate directly or through a buffer layer of magnesium oxide epitaxial layer. The three-dimensional integrated circuit employs the ferrimagnetic alternative multilayer film complex as a magnetic device. COPYRIGHT: (C)2005,JPO&NCIPI