| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a crack-detecting method for a substrate, comprising a simplified equipment and processes. <P>SOLUTION: The crack detecting method for a substrate comprises a step (1) of generating noise by application of a vibration to the substrate, a step (2) of capturing the noise and conducting an acoustic analysis for the same, for determining its power spectrum, and a step (3) of detecting the presence/absence of cracks in the substrate, based on the spectral intensity of a given frequency range. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
