BARRIER FILM FOR LIGHT-EMITTING DISPLAY AND METHOD FOR PRODUCING SAME

摘要

Disclosed are a barrier film capable of protecting an organic EL device effectively and a method for efficiently producing such a barrier film. Also disclosed is a light-emitting display with excellent durability wherein there is hardly formed a non-light-emitting portion such as a dark spot. Specifically disclosed is a vapor deposition method for producing a barrier film for light-emitting displays which contains a glass material composed of at least three components. A light-emitting display comprises a supporting substrate (1), a light-emitting body (2) and a barrier film (3) produced by such a method. The barrier film can be produced by a sputtering method using a target composed of a glass material containing 50-90 wt% of silicon oxide, 5-20 wt% of boron oxide and 1-10 wt% of aluminum oxide.