| 摘要 |
PURPOSE:To obtain the title instrument having high accuracy by placing an object to be measured in a through-hole of a heating block and providing a detector for detecting the radiation energy of the reverse side, and calculating the emissivity of the object to be measured from an output of the detector immediately after said object has been placed and a block temperature, etc. CONSTITUTION:On one opening of a through hole 2a of a heating block 2, an object 1 to be measured of a silicon wafer, etc., is placed, and on the other opening, a detector 3 for detecting the radiation energy from the back of the object 1 to be measured is provided. Also, an output of the detector 3 and an output of a temperature sensor 4 of the block 2 are supplied to an arithmetic means 5. Subsequently, the emissivity is derived from an output of the detector 3 immediately after the object to be measured 1 has been placed on the block 2, and a temperature of the block 2, and thereafter, by using this emissivity, a temperature of the object to be measured 1 is calculated by the arithmetic means 5. Accordingly, the temperature measurement can be executed with high accuracy. |
