METHOD FOR ANALYZING ULTRA LOW LEVEL SULFUR COMPOUNDS USING PLASMA MOLECULAR EMISSION SPECTROPHOTOMETRY HAVING SIMPLE STRUCTURE

摘要

PURPOSE: A method for analyzing ultra low level sulfur compounds is provided to analyze ultra low level sulfur compounds by using a plasma molecular emission spectrophotometry having a simple structure. CONSTITUTION: A test device for performing a method for analyzing ultra low level sulfur compounds includes a plasma reactor, a plasma power supply unit, a vacuum pump system, a pressure meter, a gas supply unit, and an analyzing system. A hollow electrode plasma molecular emission spectrophotometry is provided to analyze ultra low level sulfur compounds. The hollow electrode plasma molecular emission spectrophotometry includes a measurement section, a hollow electrode, and a gas injection port.