| 摘要 |
<p>Disclosed is a vacuum pump comprising a pump unit (10) and a control device (20), which are interconnected by means of cables. A microcontroller (26) that is provided in the control device (20) controls an inverter (25) supplying motor power to the turbomolecular pump (11). A microcontroller (16) which is disposed inside the pump unit (10) monitors operation of the pump and also stores device-specific data and event-related data of the turbomolecular pump. The microcontrollers (16, 26) mutually monitor each other and monitor the security of data communication and the intactness of the transmission channels.</p> |
