HEAT PLATE FOR CVD DEVICE,申请号JP19980048916-传众专利搜索

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法人/股东/高管

发明名称	HEAT PLATE FOR CVD DEVICE
摘要
申请公布号	JPH11233244(A)	申请公布日期	1999.08.27
申请号	JP19980048916	申请日期	1998.02.12
申请人	SUMIJU SN BUSINESS:KK;HAKKO ELECTRIC MACH WORKS CO LTD	发明人	AKAIDA KATSUYOSHI;FUJIMOTO YUTAKA;KAKIZAKI MASATAKE
分类号	H05B3/20;C23C16/44;H01L21/205;(IPC1-7):H05B3/20	主分类号	H05B3/20
代理机构		代理人
主权项
地址

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