| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for generating clusters and cluster ions, whereby plasma or rare gas uniformly erodes a sample to discharge uniform atoms, the sample can be continuously used for a long period of time, and growth of the clusters can be accurately controlled. SOLUTION: The pressurized rare gas is made to flow in the longitudinal direction of the movable, to and fro, round bar sample, and a magnetic field is applied to the tip part of the round bar sample to generate plasma. Thereby, clusters are generated from the sample surface at the tip part. COPYRIGHT: (C)2005,JPO&NCIPI
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