| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron source substrate manufacturing apparatus which can manufacture a accurate electron source substrate having electron emitters. <P>SOLUTION: The electron source substrate manufacturing apparatus injects a solution containing a fine metal particle material for forming a conductive thin film between multiple pairs of element electrodes 2, 3 on a substrate 14 with an injection head to form a group of surface conduction type electron emitters by the conductive thin films. This group of the surface conduction type electron emitters is formed so that the distance between the element electrodes is smaller than an arrangement pitch of the electron emitters, and injection-provision control is performed so as to injection-provide the solution between the element electrodes 2, 3 to form a dot pattern. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
