| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a machine and method for optical processing capable of precisely and satisfactorily execute optical processing of a matter to be processed optically. SOLUTION: In an optical processing machine for optically processing a matter to be processed optically by illuminating a pattern on a mask with a luminous flux from a light source means and projecting the pattern on the mask onto the matter to be processed with a projection lens, the mask utilizes phase shift.</p> |
