Workpiece supporting device with seating mechanism using a load sensor

摘要

In order to detect accurately a seating of clamped body and a clamping force at a seating, the workpiece supporting device has plural seating mechanisms 40. Each of the seating mechanisms 40 includes a load sensing element 45 receiving a clamping force or a fixing force. The load sensing element 45 consists of a material having a characteristic that said load sensing element is not substantially deformed by an applied load, especially it consists of a composite material dispersing a material having a pressure resistance effect or a magnetic resistance effect in a matrix of an electric insulation ceramics material. An abnormal clamping or fixing of the clamped body and an abnormal overload are detected by detecting an output from plural load sensing elements 45 supporting the clamped body.