| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect interatomic force and a tunnel current between a probe and a sample, and to measure a surface situation and a local current distribution in the same place with excellent reproducibility. SOLUTION: This instrument is provided with a flexible cantilever having the conductive probe, a means for oscillating the cantilever and the probe by a specified frequency, a means for controlling a displacement (vibration amplitude) of the cantilever at a constant level, a means for impressing a bias voltage between the probe and the sample, a means for detecting a micro current in a moment when a tip of the probe contacts with a surface of the sample at a specified frequency synchronized with the oscillation frequency for the cantilever, and a means for scanning the probe along the sample surface. The scanning type local current distribution measuring instrument is provided by this manner to be suitable for measuring the surface situation of the sample and the local current distribution in the same place with the excellent reproducibility. COPYRIGHT: (C)2004,JPO
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