| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems on the failure of a piezoelectric vibrator formed by a film forming technology that is attributed to a change in external environment such as moisture by forming a hermetic atmosphere and also solve the problem on a defect attributed to pressure change in the hermetic atmosphere. SOLUTION: In the ink jet recording head equipped with a channel forming substrate 10 having a piezoelectric vibrator formed in a region corresponding to a pressure generation chamber 12 communicating with a nozzle opening, the problem on a defect attributed to change in the internal pressure is solved by providing a cap member 110 connected to the piezoelectric vibrator side of the channel forming substrate 10, and sealing a space secured to a degree not to disturb the movement and having a pressure change absorbing means 114 absorbing pressure change by being deformed in response to pressure change in the space of the cap member 110. COPYRIGHT: (C)2004,JPO
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