Optical fiber arrays with precise hole sizing

摘要

A method of making and an etchable wafer substrate for use in making optical fiber array plates includes forming a progressively increasing series of metrology holes when the plate holes are formed. The variation between designed plate hole diameter and actual plate hole diameter is determined by sequentially inserting a probe of known designed diameter into the metrology holes to determine the two size-adjacent metrology holes variation. The plate hole diameter can be determined by comparing one of the size-adjacent metrology hole diameter with the respective art work metrology hole diameter. Plate hole diameters can then be corrected for variation with further processing.