| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for improving space efficiency in a sheet type vacuum processing device composed by combining a common carrying chamber with a plurality of vacuum processing chambers. SOLUTION: Cassette chambers 3A and 3B are airtightly connected to each of the side walls 23 and 24 of the carrying chambers 2 in a polygonal airtight structure in a plane view, and one set each of the vacuum processing chambers 4A-4F are airtightly connected to the other side walls 25-27, respectively. A set of the vacuum processing chambers 4A-4F connected to each of the side walls 25-27 is stacked and arranged while having a fixed offset, and exhaust ports are formed on respective bottom surfaces. The amount of the offset is decided so as not to let the exhaust ports of the vacuum processing chambers 4A, 4C and 4E on the upper side be closed by the ceiling surfaces of the vacuum processing chambers 4B, 4D and 4F on the lower side, and each exhaust pipe is piped so as not to be bent from the exhaust port to the height position of a vacuum exhaust means. COPYRIGHT: (C)2004,JPO |
