| 摘要 |
PROBLEM TO BE SOLVED: To improve throughput by shortening the time of the opening/closing operation of a shutter mechanism. SOLUTION: In a vertical heat treatment unit 1 equipped with a shutter mechanism 17 for opening/closing a furnace port 4 of a vertical heat treatment furnace 3, the shutter mechanism 17 is provided with a cover 18 covering the furnace port 4, an expansion arm mechanism 19 for opening/closing and moving the cover 18 from a side stand-by position A to a furnace port position B with linear motion, and a support part 20 for supporting the base part side of the expansion arm mechanism 19. Thus, the time for the opening/closing operation of the shutter mechanism can be shortened, and throughput is improved. COPYRIGHT: (C)2004,JPO
|
