| 摘要 |
PROBLEM TO BE SOLVED: To provide a light source device using an electrodeless discharge lamp capable of preventing breakage of the electrodeless discharge lamp by changing the discharge position to prevent temperature rise at a certain location. SOLUTION: This light source device has a conductive case 2 with an opening 2b, two resonators 51 and 52 which are placed inside the conductive case 2 and has a leading end facing the opening 2b and the other end fixed on the other side of the conductive case 2, a discharge lamp 4 placed at the leading end of the resonators 51 and 52, and a mirror 3 which is placed at the opening 2, has an opening 3a through which the leading end of the resonator 51 and 52 are inserted, and reflects discharge light emission from the discharge lamp, and a support mount 6 placed at the bottom of the conductive case 2, and a line 8 provided on the surface of the support mount 6, and a power supply 15 which supplies microwave to the line 8. COPYRIGHT: (C)2003,JPO |
