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发明名称
Ester compounds, polymers, resist compositions and patterning process
摘要
申请公布号
EP1148045(B1)
申请公布日期
2003.09.10
申请号
EP20010303555
申请日期
2001.04.19
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
HASEGAWA, KOJI;NISHI, TSUNEHIRO;KINSHO, TAKESHI;WATANABE, TAKERU;NAKASHIMA, MUTSUO;TACHIBANA, SEIICHIRO;HATAKEYAMA, JUN
分类号
C07C69/013;C07C69/54;C07C69/753;C08F220/18;C08F222/06;C08F232/08;G03F7/004;G03F7/039;(IPC1-7):C07C69/753;C08F20/16
主分类号
C07C69/013
代理机构
代理人
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