COMPACT EXTERNAL TORCH ASSEMBLY FOR SEMICONDUCTOR PROCESSING,申请号EP19990935034-传众专利搜索

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发明名称	COMPACT EXTERNAL TORCH ASSEMBLY FOR SEMICONDUCTOR PROCESSING
摘要
申请公布号	EP1071913(A4)	申请公布日期	2003.08.13
申请号	EP19990935034	申请日期	1999.08.02
申请人	PERSYS TECHNOLOGY LTD.	发明人	DRIMER, GIDEON;MENDELOVICI, LEO;BORIVKER, NACHUM
分类号	F23Q7/06;C30B25/14;F22B1/00;F23D14/38;H01L21/304;H01L21/31;(IPC1-7):F23Q7/06	主分类号	F23Q7/06
代理机构		代理人
主权项
地址

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