| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for detecting chemical substances and identifying and determining the chemical substances by an infrared multiple internal reflection method capable of easily and highly accurately detecting the chemical substances at low costs. SOLUTION: The chemical substance detecting apparatus comprises an infrared transmitting substrate 10, an infrared light source 20, an infrared detector 32 for detecting infrared rays to be emitted after multiple reflection inside the infrared transmitting substrate 10, a chemical substance analyzing means 30 for computing the amount of adhesion of the chemical substances which have adhered onto the infrared transmitting substrate 10 based on detected infrared rays, a substrate temperature measuring means 60 for measuring the temperature of the infrared transmitting substrate 10, a substrate heating means 74 for heating the infrared transmitting substrate 10, and a substrate temperature control means 76 for controlling the substrate heating means 74 on the basis of the temperature of the infrared transmitting substrate 10 and maintaining the infrared transmitting substrate 10 at an approximately constant temperature. COPYRIGHT: (C)2003,JPO |
