发明名称 METHOD FOR MANUFACTURING STAMPER FOR INFORMATION MEDIUM MANUFACTURE, STAMPER, AND PHOTORESIST ORIGINAL DISK
摘要 <p>A stamper on which a sharp projection-recess pattern is formed and a high-precision information medium manufactured by using the stamper. A stamper manufacturing method comprising a step of forming a light-absorbing layer (103) and a photoresist layer (104) on a substrate (102), forming a latent image in the photoresist layer (104), developing the latent image to form a projection-recess pattern (106) and thereby to fabricate a photoresist master (100), a step of giving Pd to the surface of the projection-recess pattern as a pretreatment of an electroless plating of the projection-recess pattern of the photoresist original disk (100), and a step of forming a metal thin film (108) by electroless plating on the projection-recess pattern (106) to which Pd is given, forming an Ni film (110) by electroforming on the metal thin film (108), and fabricating a stamper (120) by removing the metal thin film (108) and the Ni film (110).</p>
申请公布号 WO2003058613(P1) 申请公布日期 2003.07.17
申请号 JP2002013876 申请日期 2002.12.27
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