Carrier of disks, in particular, in the form of semiconductor wafers in wet chemical processes comprises at least two matching seating units with slits for the disks

摘要

Carrier (31) of disks (2), in particular, in the form of semiconductor wafers in wet chemical processes comprises at least two matching seating units (31a, 31b) with slits (11) for the disks. At least one (31b) of the seating units is provided with means (243, 253, 263) for prevention of rotation of the disks in the carrier.