发明名称 DICER SHEET STICKING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a dicer sheet sticking method which enables a work to be stuck to a dicer sheet without generating bubbles at a low cost by a simple device without applying local force to a work. SOLUTION: The sticking method of a work W to be subjected to dicer cut and a dicer sheet 4 has a process for sucking and holding a work W along a projecting R surface 1a to a head 1 having the R surface 1a and consisting of an elastic body with a vacuum suction hole 1b in the R surface, a process for pressing a central part of the work W held to a top part of the R surface 1a of the head 1 to an adhesive surface of the dicer sheet 4 held to a flat sheet holding stand 3, a process for pressing the part of the R surface 1a of the head 1 to the dicer sheet 4 while bending it and for pressing it to an adhesive surface of the dicer sheet 4 from a central part of the work W toward a peripheral part thereof, a process for releasing suction holding of the head 1 and a process for separating the head 1 from the work W with the work W stuck to an adhesive surface of the dicer sheet 4.
申请公布号 JP2003124153(A) 申请公布日期 2003.04.25
申请号 JP20010321833 申请日期 2001.10.19
申请人 MURATA MFG CO LTD 发明人 INAGAKI YASUSHI
分类号 B25J15/06;H01L21/301;(IPC1-7):H01L21/301 主分类号 B25J15/06
代理机构 代理人
主权项
地址