发明名称 RELEASE SHEET FOR SEMICONDUCTOR MOLD
摘要 PROBLEM TO BE SOLVED: To provide a release sheet for a semiconductor mold which prevents the mold part of the sheet-mount side from being contaminated when a semiconductor package is molded using the sheet. SOLUTION: This release sheet for a semiconductor mold shows a carbon dioxide gas permeability of not more than 20×10<-14> m<3> /m<2> /sec/Pa.
申请公布号 JP2002361643(A) 申请公布日期 2002.12.18
申请号 JP20010167118 申请日期 2001.06.01
申请人 HITACHI CHEM CO LTD 发明人 YAMAMOTO OSAMU;IKETANI TAKUJI;HIROSE AKIRA
分类号 B32B15/08;B29C33/68;B29K9/00;B32B27/00;H01L21/56;(IPC1-7):B29C33/68 主分类号 B32B15/08
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