发明名称 Apparatus and method for rotating drum chemical bath deposition
摘要 The present invention relates to a novel method and apparatus for chemical bath deposition or other plating or similar processes. The deposition may be performed in a rotating drum that has been provided with a mechanism for temperature elevation. A substrate or other suitable recipient bed upon which deposition is sought may be removably attached to the interior of the drum. Reactants or other materials may be added to the drum to deposit a film, layer, or uniform particles on the surface of the substrate.
申请公布号 US2002182338(A1) 申请公布日期 2002.12.05
申请号 US20020160193 申请日期 2002.06.04
申请人 STEVENS JOHN;FABICK LEON B. 发明人 STEVENS JOHN;FABICK LEON B.
分类号 B01J19/18;C23C18/00;(IPC1-7):C23C16/00;H01F41/00;B01J19/08;G21H5/00 主分类号 B01J19/18
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