Method of producing ferrite thin film

摘要

A raw material mixed solution containing nitrate or alkoxide of metal that constitutes a ferrite is sprayed from an atomizer by means of a carrier gas such as compressed air onto a substrate mounted on a hot plate and heated to a predetermined temperature. The method enables a thin film having a desired thickness to be formed by a simple apparatus in a short time without sacrificing good soft magnetism of a ferrite, thereby greatly contributing to downsizing and weight reduction of electronic devices.