| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the thermal stress in the junction between a ceramic susceptor and a supporting member by suppressing the occurrence of cold spots by reducing the quantity of heat escaping from the susceptor to a chamber through the member when an object to be treated is heated by means of the susceptor in a ceramic susceptor supporting structure which is constituted to install the object and attach the susceptor to the chamber. SOLUTION: This ceramic susceptor supporting structure is provided with a supporting projection 3A integrated with the back 1b of the ceramic susceptor 1, and a supporting member 13A which is attached to the chamber 2 and separated from the projection 3A. At least part 6A of the member 13A is formed of a heat insulating material. The projection 3A is attached to the supporting member 13A by means of a mechanical means 4.</p> |
