发明名称 HIGH-FREQUENCY SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a high-frequency semiconductor device that can prevent the interference and, in addition, can suppress the transmission loss between intersecting wiring layers. SOLUTION: This high-frequency semiconductor device is provided with a plurality of wiring layers 7 and 11 which is provided on a semiconductor substrate and constitutes transmission lines with a grounding plate 5 connected to a ground potential, an intersecting section in which the wiring layers 7 and 11 intersect each other through interlayer insulating films 8 and 10, and separated electrodes 9 which are selectively provided on the interlayer insulating films 8 and 10 in the intersecting section and connected to the ground potential.
申请公布号 JP2002299440(A) 申请公布日期 2002.10.11
申请号 JP20010099954 申请日期 2001.03.30
申请人 FUJITSU QUANTUM DEVICES LTD 发明人 BABA OSAMU;MIMINO YUTAKA
分类号 H01L21/768;H01L21/82;H01L21/822;H01L23/522;H01L23/552;H01L23/66;H01L27/04;H01P3/08 主分类号 H01L21/768
代理机构 代理人
主权项
地址