发明名称 GMR-Struktur und Verfahren zu deren Herstellung
摘要 The invention relates to a method for the production of a GMR structure, wherein a metal multilayer (12) is placed on a support (10, 12, 30, 34) and said metal multilayer (14) is structured to produce a GMR structure. The support (10, 12, 30, 34) has a structure before the metal layer is placed thereon and structuring is performed by means of CMP. The invention also relates to a GMR structure comprised of a support (10, 12, 30, 34) and a structured metal multilayer that is arranged on said support (10, 12, 30, 34), wherein the structured metal multilayer (14) is arranged in one or several recesses (50) in the support (10, 12, 30, 34). The invention further relates to the use of GMR structures.
申请公布号 DE10103868(A1) 申请公布日期 2002.08.22
申请号 DE20011003868 申请日期 2001.01.30
申请人 ROBERT BOSCH GMBH 发明人 GRUEN, DETLEF;FISCHER, FRANK;SIEGLE, HENRIK;HEIN, PETER
分类号 G01D5/18;G01D5/245;G01R33/09;H01L43/08;H01L43/12;(IPC1-7):H01L43/12;H01L27/22 主分类号 G01D5/18
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