发明名称 METHOD FOR MANUFACTURING InP POLYCRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing an InP polycrystal with high productivity and high purity. SOLUTION: In the method for manufacturing the InP polycrystal by a horizontal boat method, a graphite vessel with an impurity concentration of 400 ppm or less is used as a vessel where In is accommodated, a transfer speed of the graphite vessel is set on the range of 20 to 50 mm/h and a high-frequency induction heating is used for heating the graphite vessel.
申请公布号 JP2002160911(A) 申请公布日期 2002.06.04
申请号 JP20000352184 申请日期 2000.11.20
申请人 SHOWA DENKO KK 发明人 SATO KOJI
分类号 C01B25/08;(IPC1-7):C01B25/08 主分类号 C01B25/08
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