摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an InP polycrystal with high productivity and high purity. SOLUTION: In the method for manufacturing the InP polycrystal by a horizontal boat method, a graphite vessel with an impurity concentration of 400 ppm or less is used as a vessel where In is accommodated, a transfer speed of the graphite vessel is set on the range of 20 to 50 mm/h and a high-frequency induction heating is used for heating the graphite vessel.
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