| 摘要 |
A microscopic illumination apparatus, comprises a light source for supplying illumination light, a collector lens for converting a divergent light flux emitted from the light source into substantially parallel light fluxes, a fly-eye lens disposed at a rear focal position of said collector lens, and a relay optical system for relaying a pseudo plane light source which is formed on an exit end surface of the fly-eye lens to an aperture stop or a surface conjugate to the aperture stop. The following conditions are satisfied: (1) 8<=f<=24; and (2) 1<=d<=3, where f is the focal length of one element for constituting the fly-eye lens, and d is the radius of the one element for constituting the fly-eye lens.
|
