| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that it is impossible to suppress any overshoot or undershoot after a target stationary temperature is obtained in the conventional control system for allowing plural control loops to independently operate, and for controlling the output of a ramp waveform in order to make the timings in which a prescribed temperature is obtained the same. SOLUTION: One control loop (out of 4, 9, 10, 6, 7, 2) is controlled with a target stationary temperature, and the other control loops (4, 14, 15, 6, 7, 2) are controlled with the detected temperature of the control loop.
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