PROTECTIVE FILM TRANSFERRING SHEET FOR PHOTOMASK AND METHOD FOR TRANSFERRING PROTECTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a protective film transferring sheet for a photomask capable of transferring a protective film excellent in adhesiveness to the image surface of the photomask and in scuffing and wear resistances and solvent resistance and to provide a method for transferring the protective film. SOLUTION: The protective film transferring sheet 1 is obtained by disposing a protective film 3 on a peelable base 2. The protective film 3 is formed by successively stacking a protective layer 31 and an adhesive layer 32 from the base 2 side. The adhesive layer 32 is pressure-sensitive, the adhesiveness of the layer 32 to the image surface of a photomask is increased by heating after sticking to the image surface and the layer 32 is cured by irradiation with ionizing radiation.